A Technique for Depositing Sensing Layers in Integrated Microsensor Arrays by Automated Fluid Dispensing

May 16, 1997

Conference Paper

A Technique for Depositing Sensing Layers in Integrated Microsensor Arrays by Automated Fluid Dispensing

Abstract

A technique for depositing chemically sensitive layers by automated fluid dispensing is described.

Revised: January 30, 2020 | Published: May 16, 1997

Citation

Domansky K., and E.A. Watters. 1997. A Technique for Depositing Sensing Layers in Integrated Microsensor Arrays by Automated Fluid Dispensing. In Proceedings of the 3rd International Symposium on Microstructures and Microfabricated Systems, May 4-9, 1997, Montreal, Canada, edited by P.J. Hesketh, G. Barna and H.G. Hughes, 97, 144-151. Pennington, New Jersey:The Electrochemical Society, Inc. PNNL-SA-28493.