Studies the growth and structure of thin TiOx films on W(11) using Auger electron spectroscopy, low energy electron diffraction, and scanning tunneling microscopy. Presents evidence that several different ordered TiOx film structures can result depending on the initial amount of Ti deposited and the final annealing temperature.
Published: April 14, 2021
Citation
Herman G.S., M.C. Gallagher, S.A. Joyce, and C.H. Peden. 1996.Structure of Epitaxial Thin TiOx Films on W(110) as Studied by Low Energy Electron Diffraction and Scanning Tunneling Microscopy.Journal of Vacuum Science and Technology B--Microelectronics and Nanometer Structures 14, no. 2:1126-1130.PNNL-SA-26584.doi:10.1116/1.588413