August 1, 2025
Journal Article

Structure and Surface Morphology of highly conductive RuO2 films Grown on MgO by Oxygen-Plasma-Assisted MBE

Abstract

Metallic RuO2(110) thin films were grown by oxygen-plasma-assisted molecular beam epitaxy (MBE) on MgO(100) and (110) at 425C. RuO2 films on MgO(100) are epitaxial with two variants, while ruO2 films on MgO(110) are highly oriented with the (110) face parallel to the substrate surface.

Published: August 1, 2025

Citation

Gao Y., G. Bai, Y. Liang, G.C. Dunham, and S.A. Chambers. 1997. Structure and Surface Morphology of highly conductive RuO2 films Grown on MgO by Oxygen-Plasma-Assisted MBE. Journal of Materials Research 12, no. 7:1844-1849. PNNL-SA-28281. doi:10.1557/JMR.1997.0253