March 1, 2004
Journal Article

Stress in Thin Films

Abstract

This is the third column in a series of mechanical properties that affect the performance of thin films. I discussed defects and adhesion in my last two columns. This month I will finish off with mechanical stress. These columns are meant to introduce you to all aspects of these topics, and serve as a spring board for further investigation. While I discuss several items, one short column can by no means address all aspects of these enormously complex subjects.

Revised: April 27, 2004 | Published: March 1, 2004

Citation

Martin P.M. 2004. Stress in Thin Films. Vacuum Technology & Coating 5, no. 3:6-12. PNNL-SA-41448.