Magnetron sputter-deposited features and coatings incorporated where other methods for producing these features have been deemed unacceptable. Applications include sensors, heaters, temperature probes, electrical leads, etc., and small features, such as electrodes, heaters on microfluidic chips. Use of the coating technology, its application in the fabrication of these devices and the technical issues, such as adhesion and chemical resistance are addressed.
Revised: May 28, 2002 |
Published: July 1, 2000
Citation
Matson D.W., P.M. Martin, W.D. Bennett, J.W. Johnston, D.C. Stewart, and C.C. Bonham. 2000.Sputtered Coatings for Microfluidic Applications.Journal of Vacuum Science and Technology A--Vacuum, Surfaces and Films 18, no. 4, pt 2:1998-2002.PNNL-SA-32348.