October 25, 2005
Journal Article

Simple Method for Estimating and Comparing of X-Ray Damage Rates

Abstract

This note describes an approach for estimating and comparing rates or thresholds for x-ray induced specimen damage during surface analysis. The method uses a common reference material to compare x-ray damage rates reported in the literature and in publications to the rates of damage that may occur on a specific instrument. Although the method makes several assumptions that are only partially valid, results from a few damage data-sets appear acceptably consistent when comparing estimates to a time for 10% damage or signal change.

Revised: December 30, 2014 | Published: October 25, 2005

Citation

Baer D.R., M.H. Engelhard, A.S. Lea, and L.V. Saraf. 2005. Simple Method for Estimating and Comparing of X-Ray Damage Rates. Journal of Vacuum Science and Technology A--Vacuum, Surfaces and Films 23, no. 6:1740-1744. PNNL-SA-43208. doi:10.1116/1.2073387