Inequivalent angular distributions have been found for La and Al in the ablation plume from LaAlO3 single crystal targets using a KrF laser during pulsed laser deposition. Angular distributions and stoichiometries in the condensate were measured and reveal decidedly non-stoichiometric transfer from target to substrate over most of the angular range. Composition varied dramatically for plume angles parallel to the long axis of the laser spot with the on-axis position exhibiting a peak in the La/Al atom ratio at ~1.5. The distributions were more diffuse in the perpendicular direction. Stoichiometric LaAlO3 was found in the condensate only at an extreme off-axis position.
Revised: August 18, 2014 |
Published: September 22, 2010
Citation
Droubay T.C., L. Qiao, T.C. Kaspar, M.H. Engelhard, V. Shutthanandan, and S.A. Chambers. 2010.Non-stoichiometric material transfer in the pulsed laser deposition of LaAlO3.Applied Physics Letters 97, no. 12:124105.PNNL-SA-73524.doi:10.1063/1.3487778