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Publications & Reports
September 12, 2011
Report
Enhanced Densification of SDC Barrier Layers
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Abstract
This technical report explores the Enhanced Densification of SCD Barrier Layers
Revised: February 17, 2012 | Published: September 12, 2011
Citation
Hardy J.S., J.W. Templeton, Z. Lu, and J.W. Stevenson. 2011.
Enhanced Densification of SDC Barrier Layers
Richland, WA: Pacific Northwest National Laboratory.