We report new results on materials properties of Fe/FeAIN thin films. Films were fabricated via a pulsed DC sputtering technique. Sputtering target materials were FeAl where x varies from 0.025 to 1. Film thickness varied from 0.01 to 4 micrometers, and particle size varied from 5 to 100 nanometers, depending on the fabrication conditions and target materials. A film with 22 layers was also fabricated via the sputtering technique. Materials properties of the films were analyzed by SEM/EDS, XRD, RBS, and ESCA (XPS).
Revised: February 10, 2009 |
Published: August 1, 2008
Citation
Liu Y., R.E. Miller, T. Zhang, Q. Feng, W. Votava, D. Li, and L.N. Dunkleberger, et al. 2008.Coatings of Fe/FeAIN Thin Films. In Advanced Ceramic Coatings and Interfaces: Ceramic Engineering and Science Proceedings, 27, 265-275. Westerville, Ohio:American Ceramic Society.PNNL-SA-53585.