JEOL IT500HRLV Field Emission Scanning Electron Microscope
Located in PSF | Stewarded by Matthew Olszta and Nicole Overman,
Reactor Materials & Mechanical Design Group

The JEOL IT500HRLV Field Emission Scanning Electron Microscope is located in PNNL's Physical Sciences Facility.
Andrea Starr | Pacific Northwest National Laboratory
Mission
The JEOL IT500HRLV field emission scanning electron microscope (FE-SEM) is intended to enable imaging and characterization for in-situ micro-mechanical and thermal experiments. Equipped with JEOL’s largest SEM chamber, the microscope can accommodate a wide variety of internal testing platforms, such as micro-tensile, indentation, and heating stages, in addition to large specimens.
The SEM was added to the PSF microscopy suite in 2021 and is currently outfitted with dual energy dispersive X-ray spectroscopy (EDS) detectors in order to reduce shadowing effects and enable high fidelity compositional information over regions of increased topography.
While the microscope is currently limited to imaging, compositional analysis, and large area mapping, the group expectsto add in-situ test stages to it in the future.
Features
- Large volume chamber
- Variable kV
- Low-vacuum capable
- Nanometer resolution
- Oxford AZtec NanoAnalysis Software
- Analytical and image montaging
Detectors
- Secondary and upper electron detectors
- Retractable Backscattered Electron Detector
- Dual 100 mm2 EDS detectors