The kinetics of the thermal oxidation of AlN powder in flowing oxygen over temperatures from 800 to 1150 °C and the morphology and crystallinity of the resultant oxide were determined. The oxidation of two types of AlN powder was investigated and compared. Complex difference in the oxidation behavior was observed, probably due to their different morphology, particle size, particle size distribution, and residual impurities. Amorphous alumina formed at relatively low oxidation temperatures (800-1000 °C), with a linear oxidation rate governed by interfacial reaction. Crystalline alumina formed at higher temperatures (>1000 °C), and the oxidation rate was parabolic which suggested an oxidant diffusion controlled process.
Revised: August 9, 2006 |
Published: July 31, 2006
Citation
Gu Z., J.H. Edgar, C.M. Wang, and D. Coffey. 2006.Thermal Oxidation of Aluminum Nitride Powder.Journal of the American Ceramic Society 89, no. 7:2167–2171.PNNL-SA-47066.doi:10.1111/j.1551-2916.2006.01065.x