CVD process has been studied and optimized to achieve 2x scale up of porous Si anode materials with a clean process. The roles of CVD temperature, duration, C2H2 gas pressure, and carrier gas have been optimized. It is found that LHCE (LHCE-1 and LHCE-4) can lead to more than 50% increase in the cycling stability of Si||NMC622 cells. LHCE-4 can also lead to smaller impedance increase and longer calendar life when tested in single layer pouch cells. These results are very helpful in the understanding of the Si based anode and further development of Si based Li ion batteries.