PNNL

Abstract

The application of vacuum deposition techniques to the fabrication of solid oxide fuel cell materials and structures are reviewed, focusing on magnetron sputtering, vacuum plasma methods, laser ablation, and electrochemical vapor deposition. A description of each method and examples of use to produce electrolyte, electrode, and/or electrical interconnects are given. Generally high equipment costs and relatively low deposition rates have limited the use of vacuum deposition methods in solid oxide fuel cell manufacture, with a few notable exceptions. Vacuum methods are particularly promising in the fabrication of micro fuel cells, where thin films of high quality and unusual configuration are desired.