PNNL

Mission

The FEI Helios Hydra UX Focused Ion Beam-Scanning Electron Microscope supports non-radiological material sample preparation and analysis using the ion source to prepare transmission electron microscopy, atom probe tomography, and secondary-ion mass spectrometry samples. It also conducts energy dispersive X-ray spectroscopy (EDS) and Electron Backscatter Diffraction (EBSD).

Features

• Plasma Ion source using Xe, Ar, O and N; 2-30keV
• Schottky Electron source
• MultiChem Deposition System with C, Pt and W
• EasyLift for extracting FIB-TEM, APT and SIMS samples
• Low keV retractable backscatter detector
• Retractable STEM detector
• Oxford energy dispersive EDS and EBSD detector
• Cryo-capable