Abstract
Mask-modulated spectra are incident to a sensor and are summed during a frame time. After the frame time, a compressed spectrum is read out based on the sum and decompressed to obtain spectra for some or all specimen locations. The mask-modulated spectrum that are summed are associated with different modulations produced by a common mask.
Application Number
15/482,629
Inventors
Browning,Nigel D
Stevens,Andrew J
Kovarik,Libor
Market Sector
Analytical Instruments