Surface Roughness and Growth Texture of (Ba,Sr)TiO3 Thin Films Formed by MOCVD

February 1, 1999

Conference Paper

Surface Roughness and Growth Texture of (Ba,Sr)TiO3 Thin Films Formed by MOCVD

Abstract

Describes results of (Ba,Sr)TiO3 thin films grown on Ir/SiO2/Si substrates with MOCVD as well as the correlation between these results and dielectric properties.

Revised: November 10, 2005 | Published: February 1, 1999

Citation

Gao Y., P.V. Alluri, S. He, M.H. Engelhard, A.S. Lea, B. Melnick, and R.L. Hance. 1999. Surface Roughness and Growth Texture of (Ba,Sr)TiO3 Thin Films Formed by MOCVD. In Ferroelectric Thin Films VII, Materials Research Society Symposium Proceedings, edited by R.E. Jones, 541, 29-34. Warrendale, Pennsylvania:Materials Research Society. PNNL-SA-30152.