Thin film multi-layered chalcogenide glass waveguide structures have been fabricated for evanescent wave sensing of bio toxins and other applications. Thin films of Ge containing chalcogenides have been deposited onto Si substrates, with a-GeSe2 as the cladding layer and a-GeSbSe as the core layer to form the slab waveguide. Channel waveguides have been written in the slab waveguides by appropriate light the through a mask. The photo-induced structural changes in the core layer selectively enhance refractive index at the portions of interest and thus confining the light to the channels. The waveguides have been characterized and tested for the guiding of light.
Revised: February 10, 2012 |
Published: January 24, 2004
Citation
Ganjoo A., H. Jain, J.V. Ryan, R. Song, R. Chanda, C.J. Irudayaraj, and Y.J. Ding, et al. 2004.Fabrication of chalcogenide glass waveguide for IR evanescent wave sensors. In Proceedings of the SPIE: Nanosensing: Materials and Devices, October 25, 2004, Philadelphia, Pennsylvania, edited by MS Islam and AK Dutta, 5593, Paper No. 637. Bellingham, Washington:SPIE.PNNL-SA-85360.doi:10.1117/12.573900