PNNL

Abstract

Defects have been the bane of, and led to the failure of many a thin film. Defects come in many shapes, forms and sizes, and are a fact of life in the coating business. Virtually every technology and product related to thin film materials has had to deal with these little menaces. Defects include voids, uncompensated bonds, cracks, nodules, particulates, bubbles, inclusions, pin holes, and chemical defects such as impurities and chemisorbed materials.