PNNL

Abstract

This paper demonstrates the measurements on well defined "dots" of a material on a substrate provide a useful experimental approach for determining the area of a speciman that contributes to a small area XPS measurement. The method provides information that can verify instrument operation conditions and the adequacy of speciman alignment procedures. A data set collected primarily on one system demonstrates how some general properties of an instrument can be learned in order to understand and optimize data collection methods. The relationship of common methods of measuring spatial resolution and the dot test method are discussed.