The Stopping and Range of Ions in Matter (SRIM) code has been widely used to predict nuclear stopping power and angular distribution of ion-solid collisions. However, experimental validation of the predictions is insufficient for slow heavy ions in nonmetallic compounds. In this work, time-of-flight secondary ion mass spectrometry (ToF-SIMS) is applied to determine the angular distribution of 1 MeV Au ions after penetrating a Si3N4 foil with a thickness of ~100 nm. The exiting Au ions are collected by a Si wafer located ~14 mm behind the Si3N4 foil, and the resulting 2-dimensional distribution of Au ions on the Si wafer is measured by ToF-SIMS. The SRIM-predicted angular distribution of Au ions through the Si3N4 thin foil is compared with the measured results, indicating that SRIM slightly overestimates the nuclear stopping power by up to 10%. In addition, thickness reduction of the suspended Si3N4 foils induced by 1 MeV Au ion irradiation is observed with an average loss rate of ~107 atom/ion.
Revised: September 23, 2014 |
Published: March 18, 2014
Citation
Jin K., Z. Zhu, S. Manandhar, J. Liu, C. Chen, V. Shutthanandan, and S. Thevuthasan, et al. 2014.Angular Distribution and Recoil Effect for 1 MeV Au+ Ions through a Si3N4 Thin Foil.Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms 332.PNNL-SA-98255.doi:10.1016/j.nimb.2014.02.093