PNNL

Mission

The FEI Quanta 3D supports various materials science research projects, primarily to fabricate samples for transmission electron microscopy and scanning transmission electron microscopy (TEM/STEM) analysis and 3D-atom probe tomography. Its focused ion beam (FIB) scanning electron microscope (SEM) is equipped with energy-dispersive X-ray spectroscopy (EDS) and electron backscatter diffraction, or EBSD. High-resolution surface imaging is possible down to 1 nm at 30 keV, and it can operate under different vacuum modes (high vacuum, low vacuum, and environmental mode). In addition, this instrument can handle both radiological and non-radiological samples, which can be prepared in the Quanta 3D FIB/SEM by our qualified users.

Features

• Field emission gun (1 kV to 30 kV)
• Ion Optics
  • High-current ion column with Ga liquid-metal ion source
  • Acceleration voltage: 2 – 30 kV
  • Probe current: 1 pA – 65 nA in 15 steps
  • 15-position aperture strip
  • Magnification 40 x – 1280 kx in "quad" mode at 10 kV

• Detectors
  • Everhardt-Thornley SED
  • Low-vacuum SED (used in low vacuum)
  • Gaseous SED (used in ESEM mode)
  • Solid-state retractable BSED
  • Gaseous analytical BSED (used for low-vacuum analytical applications)
  • EDS: Oxford XMax silicon drift detector (80 mm²) and INCA software
  • HKL EBSD systems

Related publications:

Alan Schemer-Kohrn, Dan Edwards. 2019. "Removal of FIB Damage using Flash Electropolishing for Artifact-free TEM Foils." Microscopy and Microanalysis, Vol 25, Supplement S2.