PNNL

Abstract

Electrically and thermally isolated surfaces are often crucial for improving the detection sensitivity of microelectronic sensors. The site specific in-situ growth of Pt nano-rods on thermally and electrically isolated micro-fabricated SiO2 disks using wet chemical etching and focused ion/electron dual-beam (FIB-SEM) is demonstrated in this work. Fabrication of an array of micro-cavities on top of micro-disk is also demonstrated. FIB source is also utilized to fabricate through-holes in the micro-disks. The nature of Ga Gaussian distribution in the Ga-implanted region using a FIB source can naturally create more conducting layer on the sidewalls of through-holes on the micro-disks. Some sensor design concepts based on micro-fabrication of SiO2 micro-disks utilizing thermally and electrically isolated surfaces are discussed from the viewpoint of applications in photonics and bio-sensing.