September 1, 2015
Journal Article

Sensing of gaseous HF at low part-per-trillion levels using a tunable 2.5 µm diode laser spectrometer operating at ambient pressure

Abstract

We demonstrate a sensor based on tunable diode laser absorption spectroscopy (TDLAS) for detection of hydrogen fluoride (HF) gas at ambient pressure. Absorption from the HF R(1) ro-vibrational peak at ? = 4038.962 cm 1 (2.476 µm) in the fundamental (?? = 1) band is measured, and a quantitative spectral fit based on HITRAN data is used to account for overlapping spectral peaks of HF and water vapor. The sensor is optimized for detection of transient variations in HF concentration and exhibits a noise-equivalent sensitivity of 38 parts-per-trillion by volume (ppt) for 1-second integration time and 2.3 ppt sensitivity for 10-minute integration time.

Revised: September 30, 2015 | Published: September 1, 2015

Citation

Craig I.M., B.D. Cannon, M.S. Taubman, B.E. Bernacki, R.D. Stahl, J.T. Schiffern, and T.L. Myers, et al. 2015. Sensing of gaseous HF at low part-per-trillion levels using a tunable 2.5 µm diode laser spectrometer operating at ambient pressure. Applied Physics B. Lasers and Optics 120, no. 3:505-515. PNNL-SA-103832. doi:10.1007/s00340-015-6159-0