We utilize focused ion beam (FIB) to explore various sputtering parameters to form large area microcorrals and cavities on cantilevers. Microcorrals were rapidly created by modifying ion beam blur and overlaps. Modification in FIB sputtering parameters affects the periodicity and shape of corral microstructure. Cantilever deflections show ion beam amorphization effects as a function of sputtered area and cantilever base cavities with or without side walls. The FIB sputtering parameters address a method for rapid creation of a cantilever tensiometer with integrated fluid storage and delivery.
Revised: December 28, 2011 |
Published: September 14, 2011
Citation
Saraf L.V., and D.W. Britt. 2011.Large Area Microcorrals and Cavity Formation on Cantilevers using a Focused Ion Beam.Journal of Vacuum Science and Technology Part B. Nanotechnology & Microelectronics 29, no. 5:Article No. 051603.PNNL-SA-76520.doi:10.1116/1.3626833