PNNL

Abstract

Indium-free transparent conducting oxides may provide a lower cost solution for the transparent anode in flexible displays and energy efficient solid state lighting. We report herein a near room temperature sputtering process for generating an indium-free transparent conductive oxide (TCO) coating on a flexible substrate. Specifically, we deposited gallium-doped zinc oxide (GZO) uniformly over a 12” diameter area at room temperature on polyethylene terephthalate (PET). During deposition, the system heats to about 60oC due to the energetic sputtering conditions, without any noticeable damage to the PET substrate. The GZO films exhibit excellent physical, optical and electrical properties: roughness ~7 nm, transmittance >85% and resistivity ~ 10-3 ohm• cm. Phosphorescent blue organic light-emitting devices (OLEDs) were fabricated on these substrates with comparable performance (16% external quantum efficiency and 33 lm/W power efficiency at 1mA/cm2) to that of devices fabricated on GZO (or ITO) deposited on glass substrates, suggesting flexible GZO/PET substrates may be used instead of high-cost and rigid ITO and glass for flexible displays and solid state lighting.