PNNL

Abstract

When a solid surface containg more thatn on component is bombarded by energetic particles, the sputtered flux is found to deviated fromt he stoichiometric composition of the target. Thisis known as preferential sputtering. Usually the sputtered flux is enriched with the lighter-mass particles, particularly at small emission angles. As the bombardment of the target is continued, the target surface becomes depleted in the particles that are preferentially emitted and a steady state is eventually established, where the ratio of the sputtered particles becomes equal to the natural abundance ratio of the particles in the target.