July 24, 2004
Journal Article

Design, Fabrication and Characterization of a Miniaturized Series-Connected Potentiometric Oxygen Sensor

Abstract

Miniaturization of potentiometric sensors facilitates connecting many sensors in series to amplify the output. Miniaturized series-connected potentiometric sensors were developed on silicon (Si) wafer by microfabrication techniques. The sensors consist of a thin nickel-nickel oxide (Ni-NiO) mixture. The open circuit voltage (OCV) was tested in air at 300C and was found to be lower than expected. The output of the net sensor increased almost linearly by connecting 10 sensors in series. Impedance spectroscopy was used to investigate the electrolyte and electrolyte-electrode interfaces using a two electrode configuration.

Revised: October 25, 2005 | Published: July 24, 2004

Citation

Radhakrishnan R., A.V. Virkar, S.C. Singhal, G.C. Dunham, and O.A. Marina. 2004. Design, Fabrication and Characterization of a Miniaturized Series-Connected Potentiometric Oxygen Sensor. Sensors and Actuators. B, Chemical 105. PNNL-SA-46406. doi:10.1016/j.snb.2004.06.014