Chopping of Near- and Mid-Infrared Radiation Using a Curled Electrostatic MEMS Actuator

April 1, 2003

Conference Paper

Chopping of Near- and Mid-Infrared Radiation Using a Curled Electrostatic MEMS Actuator

Abstract

An electrostatic MEMS actuator known as the "Artificial Eyelid" can be used as a micromechanical chopper for IR detectors. The actuator structure consists of a curled polymer/metal film stack which is microfabricated and released from an IR transparent substrate. These flexible film actuators can act as IR choppers, providing transmission of radiation to the sensor elements when open (curled) and relection when closed (uncurled). Arrays of actuators were fabricated on ITO-coated glass substrates and ranged in size from 4 x 4 mm to 7.5 x 15 mm iwth individual elements ranging from 250 to 500 microns on a side.

Revised: March 9, 2004 | Published: April 1, 2003

Citation

Dausch D., S. Goodwin, and G.J. Exarhos. 2003. Chopping of Near- and Mid-Infrared Radiation Using a Curled Electrostatic MEMS Actuator. In PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING: Infrared technology and applications, 29th Conference, Orlando, FL, edited by Andresen, B. F. and Fulop, G. F., 5074, 903-910. Bellingham, Washington:INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING (SPIE). PNNL-SA-40263.