PNNL

Abstract

Energetic ions interact with materials by collisions with the nuclei and electrons of the atoms that make up the material. In these collisions energy and momentum is transferred from the projectile particle which is a moving atom or ion, to the target particles (atomic nucleus or electron). Each collision leads to a slowing down of the moving projectile and also a deflection of the trajectory which gives rise to the term scattering which is often used synonymously to describe the energy transfer process. In this chapter, we introduce from an experimental viewpoint the underlying theory for interaction of ions for analysis and modification of nanometer scale materials. A more detailed theoretical overview of the topic can be found in the recent monographs by Sigmund. Detailed derivations of the formulae introduced will not be given here but can be found in standard texts that are indicated by references. The treatment here starts by considering an individual scattering event. The results are then used to consider the effects on the primary ion in the limit where a large number of collisions take place. Subsequently, the primary effects are considered in nanometer materials which approach the thin-medium limit where the primary particles encounter only limited number of scattering centers. Finally, the dissipation of the energy deposited by the primary projectiles in secondary processes such as cascades of displaced atoms and electrons will be considered in the thick and thin medium limits. This approach was chosen because it builds upon the standard concepts in ion-matter interactions that are well know and have been widely used in experimental measurements of the stopping force and applications such as Rutherford backscattering spectrometry (RBS), ion beam modification of materials etc.