Pressure Sensor Using Gas/Liquid Interface

Patent ID: 8095 | Patent Number 8,528,383 | Status: Granted

Abstract

The device is a MEMS based pressure sensor that uses a gas/liquid interface to transduce pressure. Simply put, liquid is moved into and out of a reservoir based on the external pressure. This movement is measured and directly correlates to the external pressure using gas laws and meniscus properties. There are three points of novelty. The first is the use of a single-port priming technique. The second is a meniscus auto-calibration, and the third is the use of electronic measuments. The single-port priming means that the device has only one inlet. It can be primed by placing it in a chamber at the 'priming' pressure (defined by the user). The chip is then submersed in the functional liquid and pressure is returned to atmosphere. The second is a meniscus autocalibration. In small channels, liquid/gas interfaces result in meniscus that have a significant pressure drop. By explointing geometric properties, this pressure drop can be directly measured and factored out of the final presure measurement with disregard for the environment, temperature, liquids, solids, and gasses. The third item is the conversion mechansim. All previously reported iterations of this concept use optical reporting. Including electrodes allows for capactive, tranductive, resistive, and direct digital electronic interrogation.

Application Number

13/270,114

Inventors

Erikson,Rebecca L
Suter,Jon
Fricke,Jacob M
Evans,Allan T (PNNL)

Market Sector

Sensors