Abstract
A nanomanipulator with integrated gas injection capability has been developed. The device features a 1/4" tube with an integrated thermocouple wire and two small diameter stainless steel tubes that terminate near a tungsten needle. The tungsten wire can be cooled to cryogenic temperatures via a copper braid connected to a cold finger. Thermal insulation between the tungsten needle and the 1/4" tube body is maintained via a plastic spacer to minimize thermal conduction. The two small diameter stainless steel tubes provide a means to inject gas which flows near the end of the tungsten needle. Gas flow can be controlled independently to each small diameter stainless steel tubes, allowing the flow of the same or different gases. The lateral and horizontal positioning of the small diameter stainless steel tubes relative to the tungsten wire is made via an attached jig. The design of the device allows the introduction of various gases into the focused ion beam/scanning electron microscope to facilitate the deposition of metallic or carbonaceous thin films on cryogentically-cooled surfaces
Application Number
16/748,705
Inventors
Perea,Daniel E
Evans,James E
Market Sector
Analytical Instruments